Large-area fabrication of metasurface on microspheres based on colloidal assembly and femtosecond ablation

Tuo Qu; Fang Liu; Yuechai Lin; Yidong Huang

doi:10.1117/12.2508625

4 March 2019 Large-area fabrication of metasurface on microspheres based on colloidal assembly and femtosecond ablation

Tuo Qu, Fang Liu, Yuechai Lin, Yidong Huang

Proceedings Volume 10928, High Contrast Metastructures VIII; 109280T (2019) https://doi.org/10.1117/12.2508625
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

A nanofabrication method of metasurfaces based on colloidal assembly and femtosecond ablation is proposed and demonstrated. The metasurfaces on microspheres own the advantages of large area, low cost, long-range periodicity, high light-scattering efficiency and compatibility with liquid crystal display (LCD) manufacturing. Here, the diffractionunlimited nano-ablation is realized on the gold layer hemispherically coated on the assembled silica microspheres. The radius of ablated spot and half-pitch of ablated slit achieved in the experiment are ~130 nm and ~30 nm, respectively. Through changing the incidence angle of the femtosecond laser beam, some complicated ablation nanopatterns consisting of spots and slits would be realized.

Conference Presentation

Citation Download Citation

Tuo Qu, Fang Liu, Yuechai Lin, and Yidong Huang "Large-area fabrication of metasurface on microspheres based on colloidal assembly and femtosecond ablation", Proc. SPIE 10928, High Contrast Metastructures VIII, 109280T (4 March 2019); https://doi.org/10.1117/12.2508625

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