Thin film barium strontium titanate ferroelectric varactors for microwave applications

Hailing Yue; Devin Spatz; Shu Wang; Eunsung Shin; Guru Subramanyam

doi:10.1117/12.2224774

6 November 2015 Thin film barium strontium titanate ferroelectric varactors for microwave applications

Hailing Yue, Devin Spatz, Shu Wang, Eunsung Shin, Guru Subramanyam

Proceedings Volume 9667, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors; 966704 (2015) https://doi.org/10.1117/12.2224774
Event: International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors, 2015, Suzhou, China

Abstract

Analog phase shifters are investigated with a periodic structure that includes Barium Strontium Titanate ferroelectric thin film varactors in shunt or serial connection to the coplanar waveguide transmission line. The phase shift is achieved by applying a DC bias to the varactors and changing the reactance in the circuit. The goal of this paper is to characterize the shunt capacitive varactors regarding the voltage dependence of the capacitance, loss tangent, and insertion losses at different bias voltages. Quality factor analysis is also conducted taking the parasitic effects into account. Repeated measurements show that the capacitance of a single cell is tuned from 0.8pF to 0.2pF under a DC bias of 0-10V while the loss tangent is kept under 0.01 in the frequency range of 0-40GHz. Insertion loss is tuned from -4dB to less than -0.6dB from 0 to 10V with a Figure of Merit of 14 degrees/dB at 10GHz and the total quality factor of the unit cell is around 6.7 to 10 at 10GHz with matched port impedance. By cascading 10-25 single unit cells, the phase shift is expected to reach 360 degrees with minimum insertion loss.

Citation Download Citation

Hailing Yue, Devin Spatz, Shu Wang, Eunsung Shin, and Guru Subramanyam "Thin film barium strontium titanate ferroelectric varactors for microwave applications", Proc. SPIE 9667, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors, 966704 (6 November 2015); https://doi.org/10.1117/12.2224774

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Phase shifts

Thin films

Capacitance

Metals

Barium

Strontium

Dielectrics

Show All Keywords

Keywords/Phrases

Search In:

Publication Years