Paper
8 January 2015 CuBr laser ablation of titanium surface
Ivaylo Balchev, Nikolay Minkovski, Krasimir Dimitrov, Atanas Atanasov, Plamen Stefanov
Author Affiliations +
Proceedings Volume 9447, 18th International School on Quantum Electronics: Laser Physics and Applications; 94470O (2015) https://doi.org/10.1117/12.2178086
Event: Eighteenth International School on Quantum Electronics: Laser Physics and Applications, 2014, Sozopol, Bulgaria
Abstract
Interaction of a CuBr laser, operating at 511 nm wavelength and pulse duration of 30 ns with titanium wafers was studied. It was investigated the efficiency of laser ablation, depending on the laser fluence, on the laser beam scanning speed, and laser pulse frequency. The titanium surface modification was studied by scanning electron microscopy (SEM) and XPS (X-ray Photoelectron Spectroscopy). Nanosecond laser irradiation of Ti led to the formation of high porous granular structures consisting of agglomerated small micro- and sub microparticles.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ivaylo Balchev, Nikolay Minkovski, Krasimir Dimitrov, Atanas Atanasov, and Plamen Stefanov "CuBr laser ablation of titanium surface", Proc. SPIE 9447, 18th International School on Quantum Electronics: Laser Physics and Applications, 94470O (8 January 2015); https://doi.org/10.1117/12.2178086
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KEYWORDS
Titanium

Laser ablation

Pulsed laser operation

Scanning electron microscopy

Laser irradiation

Oxides

Semiconducting wafers

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