Analysis and optimization of a novel laterally deformable optical NEMS grating transducer

Chen Wang; Jian Bai; Guo-Guang Yang

doi:10.1117/12.2067787

21 August 2014 Analysis and optimization of a novel laterally deformable optical NEMS grating transducer

Chen Wang, Jian Bai, Guo-Guang Yang

Proceedings Volume 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 928303 (2014) https://doi.org/10.1117/12.2067787
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

This paper discusses the analysis and optimization of a novel optomechanical structure based on a Wood’s type anomaly, in which tiny changes in the spacing of the nanostructured grating elements lead to a dramatic increase or decrease of the optical reflection amplitude. With this special feature, this structure is an ideal sensor component to observe very small amount of relative motion. This device is very sensitive to light source wavelength, the period and the width of the grating. Here, we analyze the performance of the structure with different parameters and incident light of different wavelengths through 3-D Finite Difference Time Domain method (FDTD). Simulation gives out the respective influence of those parameters and the optimized structure designs for different wavelengths which are most possible to fabricate with current surface micromachining processing similar to that used for the fabrication of polysilicon MEMS. The calculated data enables us to apply the structure into fields required for different sensitivities and dynamic ranges with different grating designs and thus broadens the further usage of such novel structure.

Citation Download Citation

Chen Wang, Jian Bai, and Guo-Guang Yang "Analysis and optimization of a novel laterally deformable optical NEMS grating transducer", Proc. SPIE 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 928303 (21 August 2014); https://doi.org/10.1117/12.2067787

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available