Multisite on-line process control using a CCD detector system

Ishai Nir

doi:10.1117/12.137751

14 August 1992 Multisite on-line process control using a CCD detector system

Ishai Nir

Proceedings Volume 1681, Optically Based Methods for Process Analysis; (1992) https://doi.org/10.1117/12.137751
Event: SPIE's 1992 Symposium on Process Control and Monitoring, 1992, Somerset, NJ, United States

Abstract

Recent advances in both imaging spectrometers and CCD based multichannel detection systems have made possible optical process monitoring and control of several sites simultaneously using a single system. Developments in optical monitoring leading to the present state of technology are reviewed. The benefits of these new multisite systems are discussed both in terms of advances in process control they make possible and the cost reduction they represent.

Citation Download Citation

Ishai Nir "Multisite on-line process control using a CCD detector system", Proc. SPIE 1681, Optically Based Methods for Process Analysis, (14 August 1992); https://doi.org/10.1117/12.137751

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