Microelectromechanical torsional varactors with low parasitic capacitances and high dynamic range

Chenniappan Venkatesh; Navakanta Bhat; K. J. Vinoy; Satish Grandhi

doi:10.1117/1.JMM.11.1.013006

27 February 2012 Microelectromechanical torsional varactors with low parasitic capacitances and high dynamic range

Chenniappan Venkatesh, Navakanta Bhat, K. J. Vinoy, Satish Grandhi

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 1, 013006 (February 2012). https://doi.org/10.1117/1.JMM.11.1.013006

Abstract

This work focuses on the design of torsional microelectromechanical systems (MEMS) varactors to achieve highdynamic range of capacitances. MEMS varactors fabricated through the polyMUMPS process are characterized at low and high frequencies for their capacitance-voltage characteristics and electrical parasitics. The effect of parasitic capacitances on tuning ratio is studied and an equivalent circuit is developed. Two variants of torsional varactors that help to improve the dynamic range of torsional varactors despite the parasitics are proposed and characterized. A tuning ratio of 1:8, which is the highest reported in literature, has been obtained. We also demonstrate through simulations that much higher tuning ratios can be obtained with the designs proposed. The designs and experimental results presented are relevant to CMOS fabrication processes that use low resistivity substrate.

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Chenniappan Venkatesh, Navakanta Bhat, K. J. Vinoy, and Satish Grandhi "Microelectromechanical torsional varactors with low parasitic capacitances and high dynamic range," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(1), 013006 (27 February 2012). https://doi.org/10.1117/1.JMM.11.1.013006

Published: 27 February 2012

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