Lucent Microstar micromirror array technology for large optical crossconnects

Vladimir A. Aksyuk; Flavio Pardo; Cristian A. Bolle; Susanne Arney; C. Randy Giles; David J. Bishop

doi:10.1117/12.396503

22 August 2000 Lucent Microstar micromirror array technology for large optical crossconnects

Vladimir A. Aksyuk, Flavio Pardo, Cristian A. Bolle, Susanne Arney, C. Randy Giles, David J. Bishop

Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396503
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

Electrostatically actuated, 500micrometers diameter, Si surface micromachined 2-axis tilting micromirrors were designed and fabricated in a 2 structural + 1 interconnect layer polysilicon process. The mirrors are capable of large, continuous, controlled, DC tilt in any direction at moderate actuation voltages. The lowest-mode resonance frequency is sufficiently high to decouple from the ambient vibration noise and allow setting times of less than a few milliseconds. The Au- coated reflectors, suspended in gimbal mounts via torsional springs and bearings, are tilted by applying voltage to four electrically independent sets of fixed electrodes on the substrate. The electrodes and the springs are designed to optimize actuation voltages, resonance frequencies and the deflection range. To achieve the range, the mounts are lifted and fixed fifty microns above the substrate surface during the release process by a self-assembly mechanism powered by tailored residual stress in a separate metalization layer. Square arrays with 1 mm pitch containing independently addressable identical 16, 64 and 256 mirrors were fabricated and hermetically packaged. Based on these devices, fully functional, bitrate and wavelength independent, single stage, low insertion loss, single mode fiber optical crossconnect system are built.

Citation Download Citation

Vladimir A. Aksyuk, Flavio Pardo, Cristian A. Bolle, Susanne Arney, C. Randy Giles, and David J. Bishop "Lucent Microstar micromirror array technology for large optical crossconnects", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396503

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