Laser cleaning of particles from surfaces: issues relating to sample preparation

Deb M. Kane; Alanna Fernandes

doi:10.1117/12.456826

25 February 2002 Laser cleaning of particles from surfaces: issues relating to sample preparation

Deb M. Kane, Alanna Fernandes

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456826
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

Laser cleaning results depend on the particles (form and material), and the method used to deposit them on the surface. Studies using three different pulsed lasers (255 nm and 248 nm) and different particle deposition techniques are contrasted fro removing alumina particles from glass surfaces.

Citation Download Citation

Deb M. Kane and Alanna Fernandes "Laser cleaning of particles from surfaces: issues relating to sample preparation", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456826

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