Morphological phenomena of CVD diamond (Part I)

Wei Zhu; Andrzej R. Badzian; Russell F. Messier

doi:10.1117/12.22458

1 December 1990 Morphological phenomena of CVD diamond (Part I)

Wei Zhu, Andrzej R. Badzian, Russell F. Messier

Proceedings Volume 1325, Diamond Optics III; (1990) https://doi.org/10.1117/12.22458
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

A parametric influence on the morphology of CVD diamond has been investigated. While the gas pressure has a minor effect on the morphological development of diamond in the optimum temperature range, the influences by the substrate temperature, the methane concentration in hydrogen, and the gas flow rate are found to be substantial. With an increase of substrate temperature or gas flow rate over the range in this study, the surface of diamond films changes from the f 100) face dominating to the { 1 1 1 } face prevailing. With an increase of methane concentrations from 0.5% to 2%, the morphology of diamond films changes from the triangular 1 1 1 ) faces to the square f 100) faces. Further increasing methane concentrations to 5% results in a film with sub-.tm crystallite aggregates. These experimental variables change the diamond morphology possibly by influencing the free energies of crystallographic faces and the atom mobility on the surface.

Citation Download Citation

Wei Zhu, Andrzej R. Badzian, and Russell F. Messier "Morphological phenomena of CVD diamond (Part I)", Proc. SPIE 1325, Diamond Optics III, (1 December 1990); https://doi.org/10.1117/12.22458

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