Development of a one-dimensional two-stage focusing system with two deformable mirrors

T. Goto; S. Matsuyama; H. Nakamori; T. Kimura; Y. Sano; Y. Kohmura; K. Tamasaku; M. Yabashi; T. Ishikawa; K. Yamauchi

doi:10.1117/12.2061821

3 October 2014 Development of a one-dimensional two-stage focusing system with two deformable mirrors

T. Goto, S. Matsuyama, H. Nakamori, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 9208, Adaptive X-Ray Optics III; 920802 (2014) https://doi.org/10.1117/12.2061821
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

A one-dimensional two-stage focusing system using two deformable mirrors was constructed. To realize the precise elliptical shapes, the mirror deformations were finely adjusted using the pencil-beam scan, which is a method of wavefront measurement. X-rays of 10 keV energy were one-dimensionally focused to a full width at half maximum of 90 nm, which agrees well with the diffraction limit.

Citation Download Citation

T. Goto, S. Matsuyama, H. Nakamori, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi "Development of a one-dimensional two-stage focusing system with two deformable mirrors", Proc. SPIE 9208, Adaptive X-Ray Optics III, 920802 (3 October 2014); https://doi.org/10.1117/12.2061821

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