Peculiarities of x-ray scattering by thin-film roughness

Albert Yu. Karabekov; Igor V. Kozhevnikov

doi:10.1117/12.200273

23 January 1995 Peculiarities of x-ray scattering by thin-film roughness

Albert Yu. Karabekov, Igor V. Kozhevnikov

Proceedings Volume 2453, X-Ray Optics and Surface Science; (1995) https://doi.org/10.1117/12.200273
Event: X-ray Optics and Surface Science, 1994, none, Russian Federation

Abstract

The expression for X-ray scattering diagram by thin film roughness is obtained and analyzed in the perturbation theory approximation. Specific features of X-ray scattering are discussed which have no analogs in X- ray scattering from a single surface and are caused by the interference effects. These are: oscillations of X-ray scattering diagram, the lack of X-ray scattering from external film surface, and interference suppression (up to some orders) of X-ray scattering intensity.

Citation Download Citation

Albert Yu. Karabekov and Igor V. Kozhevnikov "Peculiarities of x-ray scattering by thin-film roughness", Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); https://doi.org/10.1117/12.200273

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