InGaAs/InP Tunnel FETs With a Subthreshold Swing of 93 mV/dec and <formula formulatype="inline"><tex Notation="TeX">$I_{\rm ON}/I_{\rm OFF}$</tex></formula> Ratio Near <formula formulatype="inline"> <tex Notation="TeX">$\hbox{10}^{6}$</tex></formula>