Cryogenic UHV-STM Study of Hydrogen and Deuterium Desorption from Si(100)

E. T. Foley, A. F. Kam, J. W. Lyding, and Ph. Avouris
Phys. Rev. Lett. 80, 1336 – Published 9 February 1998
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Abstract

A cryogenic UHV scanning tunneling microscope has been used to study the electron stimulated desorption of hydrogen and deuterium from Si(100) surfaces at 11 K. A strong isotope effect is observed, as seen previously at room temperature. Above 5eV, the desorption yields for H and D are temperature independent, while in the tunneling regime, below 4 eV, H is a factor of 300 easier to desorb at 11 than at 300 K. This large temperature dependence is explained by a model that involves multiple vibrational excitation and takes into account the increase of the Si-H(D) vibrational lifetime at low temperature.

  • Received 19 June 1997

DOI:https://doi.org/10.1103/PhysRevLett.80.1336

©1998 American Physical Society

Authors & Affiliations

E. T. Foley, A. F. Kam, and J. W. Lyding

  • Beckman Institute and Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801

Ph. Avouris

  • IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, New York 10598

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Issue

Vol. 80, Iss. 6 — 9 February 1998

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