The conservative and dissipative forces between tip and sample of a dynamic atomic force microscopy (AFM) were investigated using a combination of computer simulations and experimental AFM data obtained by the frequency modulation technique. In this way it became possible to reconstruct complete force versus distance curves and damping coefficient versus distance curves from experimental data without using fit parameters for the interaction force and without using analytical interaction models. A comparison with analytical approaches is given and a way to determine a damping coefficient curve from experimental data is proposed. The results include the determination of the first point of repulsive contact of a vibrating tip when approaching a sample. The capability of quantifying the tip-sample interaction is demonstrated using experimental data obtained with a silicon tip and a mica sample in UHV.

• Received 31 March 1999

DOI:https://doi.org/10.1103/PhysRevB.60.11051