In this paper, we introduce a quantum photonic device, which we term the photonic Bier-Glas cavity. We discuss its fabrication and functionality, which is based on the coupling of integrated In(Ga)As quantum dots to a broadband photonic cavity resonance. By design, the device architecture uniquely combines the Purcell enhancement of a photonic micropillar structure with a broadband photonic mode shaping of a vertical, tapered waveguide, making it an interesting candidate to enable the efficient extraction of entangled photon pairs. We detail the epitaxial growth of the heterostructure as well as the necessary lithography steps to approach a GaAs-based photonic device with a height exceeding 15 μm, supported on a pedestal that can be as thin as 20 nm. We further describe its key performance parameters using a Fourier-modal method. Finally, we present an optical characterization, which confirms the presence of broadband optical resonances, in conjunction with amplified spontaneous emission of single photons.

• Received 23 September 2020
• Accepted 4 May 2021

DOI:https://doi.org/10.1103/PhysRevMaterials.5.064603