Epitaxial thin films of $\mathrm{C}{\mathrm{r}}_{2-x}\mathrm{T}{\mathrm{i}}_x{\mathrm{O}}_3$ were deposited by oxygen-plasma-assisted molecular beam epitaxy for $0.04\le x\le 0.26$. Ti valence is verified by both x-ray photoelectron spectroscopy (XPS) and Ti $K$-edge x-ray absorption near-edge spectroscopy (XANES) to be $\mathrm{T}{\mathrm{i}}^{4+}$. Substitution of Ti for Cr in the corundum lattice is verified by fitting the Ti $K$-edge extended x-ray absorption fine structure (EXAFS) data. Room temperature electrical transport measurements confirm the highly resistive nature of Ti-doped $\mathrm{C}{\mathrm{r}}_2{\mathrm{O}}_3$, despite the presence of aliovalent $\mathrm{T}{\mathrm{i}}^{4+}$. For comparison, the resistivity of very pure, undoped $\mathrm{C}{\mathrm{r}}_2{\mathrm{O}}_3$ was measured to be four orders of magnitude higher than for Ti-doped $\mathrm{C}{\mathrm{r}}_2{\mathrm{O}}_3$. Analysis of the XPS and EXAFS data reveal the presence of Cr vacancies at intermediate and high Ti concentrations. This conclusion is corroborated by the results of density functional modeling. At low Ti concentrations, a strong increase of the XPS $\mathrm{Ti}2p$ core level peak width is observed as the Ti concentration decreases. In this limit, the formation of Cr vacancies becomes less favorable due to the increased distance between Ti dopants, and compensation by O interstitials contributes to broadening of the $\mathrm{Ti}2p$ XPS peak. The differences in electronic structure which render $\mathrm{T}{\mathrm{i}}^{4+}$-doped $\mathrm{C}{\mathrm{r}}_2{\mathrm{O}}_3$ resistive due to the formation of compensating defects, but $\mathrm{T}{\mathrm{i}}^{4+}$-doped $\mathrm{F}{\mathrm{e}}_2{\mathrm{O}}_3$ conductive, are discussed. The defect compensation model developed here provides insight into previous, conflicting reports of $n$-type versus $p$-type conductivity in Ti-doped $\mathrm{C}{\mathrm{r}}_2{\mathrm{O}}_3$ at high temperature, and will inform future studies to exploit the wide variety of electronic and magnetic properties of corundum structure oxides.

• Received 27 July 2016

DOI:https://doi.org/10.1103/PhysRevB.94.155409