Figure 1

(Color online) (a) $\text{Ne}1s$ core-level spectra (open circles) and the fitted curve (thick solid line) as a function of the implantation energy $\left(E_i\right)$ for 3 ML fluence. The experimental spectra have been normalized to the same height. The deconvoluted DS line shape (short-dashed line), the spectral line shape including the Gaussian broadening $\left(w_g\right)$ but excluding the instrumental broadening (thin solid line), and the inelastic Tougaard background (dot-dashed line) are shown. The spectra are staggered along the vertical axis. The residue for the 0.3 keV spectrum is shown in the bottom. The intensity ratio of $\text{Ne}1s_A$ and $1s_B$ is shown in the inset. $\Delta E_B$ variation in (b) $\text{Ne}1s_A$ and (c) $\text{Ne}1s_B$ with $E_i$ and fluence. For $1s_A$ $\left(1s_B\right)$, in the rainbow color scheme (gray scale), the violet (darkest) contour represents 2.6 (1.3) eV, while the red (lightest) contour is 2.2 (0.9) eV. (d) The calculated mean implantation depth $\left(d\right)$ (filled circles) and the fitted curve (solid line); the bars show the straggle. (e) Concentration of implanted Ne in Al, where the violet contour represents 4% while the red is 0.05%. (b), (c), and (e) The dots in the contour plots show the different $E_i$ and fluence combinations for which the experiments were performed.Reuse & Permissions

Figure 2

(a) $\text{Ne}1s$ core-level spectra (open circles) normalized to same height and the fitted curve (thick solid line) as a function of $T_A$ for the nanobubbles formed with $E_i=1.5\text{keV}$ and 1 ML fluence. The other line types have the same meaning as in Fig. 1a. (b) The intensity ratio of $1s_A$ and $1s_B$, and (c) concentration of Ne.Reuse & Permissions

Figure 3

$\text{Ne}1s$ core-level spectra (open circles) for bubbles (implanted with $E_i=0.3\text{keV}$ and fluence of 1 ML) before and after Ar ion sputtering. The line types have the same meaning as in Fig. 1a.Reuse & Permissions

Figure 4

Bubble radii of Ar, Xe, and Ne plotted as a function of $\Delta E_B$. The bubbles in the solid state are represented by filled symbols. The fitted curve (line) for the solid bubbles is extrapolated as dashed line.Reuse & Permissions