Recent calculations predict a dramatic influence of interfaces on the scattering of x rays by single crystals with defects. The power law describing the diffuse scattering and the peak shape of the Bragg reflections depends on the boundary conditions of the crystal lattice. These theoretical results have been verified by grazing incidence diffraction of synchrotron radiation performed on thin layers of silicon and cobalt disilicide. By variation of the angle of incident a depth profiling of the defect density has been performed.

• Received 7 December 1994

DOI:https://doi.org/10.1103/PhysRevB.51.12223