Regular pattern formation through the retraction and pinch-off of edges during solid-state dewetting of patterned single crystal films

Jongpil Ye and Carl V. Thompson
Phys. Rev. B 82, 193408 – Published 18 November 2010

Abstract

We report the formation of regular patterns of metal lines via solid-state dewetting of lithographically patterned single-crystal Ni(110) films with square and cross shapes. During the solid-state dewetting, valleys develop behind retracting edges and eventually lead to pinch-off and formation of lines. Mass accumulation at convex pattern corners also leads to formation of lines. We show that the size of large-scale patterns and surface-energy anisotropy affect the smaller-scale dewetted structures in a deterministic way.

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  • Received 11 August 2010

DOI:https://doi.org/10.1103/PhysRevB.82.193408

©2010 American Physical Society

Authors & Affiliations

Jongpil Ye and Carl V. Thompson*

  • Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA

  • *cthomp@mit.edu

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Vol. 82, Iss. 19 — 15 November 2010

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