In this work the Si self-interstitial–carbon interaction has been experimentally investigated and modeled. The interactions between self-interstitials, produced by 20-keV silicon implantation, and substitutional carbon in silicon have been studied using a ${\mathrm{Si}}_{1-y}{\mathrm{C}}_y$ layer grown by molecular beam epitaxy (MBE) and interposed between the near-surface self-interstitial source and a deeper B spike used as a marker for the Si-interstitial concentration. The C atoms, all incorporated in substitutional sites and with a C-dose range of $7\times {10}^{12}–4\times {10}^{14}{\mathrm{a}\mathrm{t}\mathrm{o}\mathrm{m}\mathrm{s}/\mathrm{c}\mathrm{m}}^2,$ trap the self-interstitials in such a manner that the ${\mathrm{Si}}_{1-y}{\mathrm{C}}_y$ layer behaves as a filtering membrane for the interstitials flowing towards the bulk and, consequently, strongly reduces the boron-enhanced diffusion. This trapping ability is related to the total C dose in the ${\mathrm{Si}}_{1-y}{\mathrm{C}}_y$ membrane. Substitutional carbon atoms interacting with self-interstitials are shown to trap Si interstitials, to be removed from their substitutional sites, and to precipitate into the C-rich region. After precipitation, C atoms are not able to further trap injected self-interstitials, and the interstitials generated in the surface region can freely pass through the C-rich region and produce B-enhanced diffusion. The atomistic mechanism leading to Si-interstitial trapping has been investigated by developing a simulation code describing the migration of injected interstitials. The simulation takes into account the surface recombination, the interstitial diffusion in our MBE-grown material, and C traps. Since the model calculates the amount of interstitials that actually react with C atoms, by a comparison with the experimental data it is possible to derive quantitative indications of the trapping mechanism. It is shown that one Si interstitial is able to deactivate about two C traps by means of interstitial trapping and C clustering reactions. The reaction causing trapping and deactivation is tentatively described.

• Received 15 August 2001

DOI:https://doi.org/10.1103/PhysRevB.65.045209