The effect of inelastic scattering on quantum tunneling through single barriers is studied as a function of the barrier transparency and the inelastic-scattering rate within the barrier. Our calculations are based on a recently proposed steady-state quantum kinetic equation, which we solve in the linear-response regime at low temperatures. It is found that the presence of a continuous distribution of localized inelastic scatterers can either enhance or reduce the tunneling current depending on the transparency of the barrier and the magnitude of the inelastic-scattering rate. For a fixed inelastic-scattering rate, the tunneling current decreases exponentially with the barrier length (L) for short L when the current is primarily elastic. But for long L, the current is primarily inelastic and decreases slowly ∼1/L, as one would expect for an ohmic resistor.

• Received 2 October 1990

DOI:https://doi.org/10.1103/PhysRevB.43.2442