We have measured the sputtering yield of Au and Cu targets as a function of energy and the angle of incidence of noble-gas projectiles in the energy range 2–50 keV. The experimental results were compared with the analytical theory of sputtering and with computer simulations. Our study indicates that the linear-cascade model is applicable only asymptotically for low nuclear stopping powers.

• Received 8 April 1986

DOI:https://doi.org/10.1103/PhysRevB.35.2198