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Structural reactions of Si{111} with cobalt and formation of cobalt disilicide

S. C. Wu, Z. Q. Wang, Y. S. Li, F. Jona, and P. M. Marcus
Phys. Rev. B 33, 2900(R) – Published 15 February 1986
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Abstract

Low-energy electron diffraction (LEED) and Auger electron spectroscopy were used to study the reactions of a clean Si{111} surface with Co. Although above surface coverages of about two monolayers the LEED patterns were always 1×1, measurements of the diffracted intensities revealed that there are three 1×1 phases. With increasing initial Co coverage they are called pre-silicide, CoSi2, and post-silicide phases, respectively. The structures of the pre-silicide and of the CoSi2 phase are very similar to one another. The structure of the CoSi2{111} surface was determined by LEED intensity analysis to be relaxed bulklike, with first interlayer spacing contracted 20% and second interlayer spacing contracted 5%. The structures of the pre- and the post-silicide phases are unknown.

  • Received 4 November 1985

DOI:https://doi.org/10.1103/PhysRevB.33.2900

©1986 American Physical Society

Authors & Affiliations

S. C. Wu, Z. Q. Wang, Y. S. Li, and F. Jona

  • College of Engineering and Applied Science, State University of New York, Stony Brook, New York 11794

P. M. Marcus

  • IBM Thomas J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598

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Issue

Vol. 33, Iss. 4 — 15 February 1986

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