Abstract
The article presents the results of establishing the influence of the carbon nanotubes growing modes by plasma enhanced chemical vapour deposition method on their geometric dimensions and adhesion properties. The results of experimental research of the activation time, plasma power, temperature, and growth time effects on the parameters of carbon nanotubes are presented. It is shown that control of growth technological modes makes it possible to create carbon nanotubes arrays of various types: bundled, individual, branched, and disoriented. The adhesion of experimental samples was investigated by atomic force microscopy. The greatest value of the adhesion force (11.12 μN) is demonstrated by aligned arrays of carbon nanotubes, which during the growing process were grouped into bundles with the diameter of individual nanotubes 51 nm, height 0.69 μm, and density 69 μm-1.
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