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The low-cost microwave plasma sources for science and industry applications

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Published under licence by IOP Publishing Ltd
, , Citation V N Tikhonov et al 2017 J. Phys.: Conf. Ser. 927 012067 DOI 10.1088/1742-6596/927/1/012067

1742-6596/927/1/012067

Abstract

Microwave plasma torches proposed in the world market are built according to a scheme that can be called classical: power supply – magnetron head – microwave isolator with water load – reflected power meter – matching device – actual plasma torch – sliding short circuit. The total cost of devices from this list with a microwave generator of 3 kW in the performance, for example, of SAIREM (France), is about 17,000 €. We have changed the classical scheme of the microwave plasmathrone and optimised design of the waveguide channel. As a result, we can supply simple and reliable sources of microwave plasma (complete with our low-budget microwave generator up to 3 kW and a simple plasmathrone of atmospheric pressure) at a price from 3,000 €.

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10.1088/1742-6596/927/1/012067