Abstract
In this study we investigated the physico-mechanical properties of alumina nanoceramics, that is used as substrates in micro- and optoelectronics chips. The elastic characteristics (Young's modulus E, shear modulus G, Poisson's ratio v, microhardness H) are determined by measuring the longitudinal and transverse wave velocities. The results suggest that the nanoceramics have unique properties that can be used in the future microelectronics to improve the stability of chips and to optimize the production technology.
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