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Development of a Compact Scanning Transmission X-Ray Microscope

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, , Citation Y Takeichi et al 2014 J. Phys.: Conf. Ser. 502 012009 DOI 10.1088/1742-6596/502/1/012009

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1 Photon Factory, Institute of Materials Structure Science, High Energy Accelerator Research Organization, 1-1 Oho, Tsukuba, Ibaraki 305-0801, Japan

2 Department of Earth and Planetary Systems Science, Hiroshima University, 1-3-1 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8526, Japan

3 National Institute for Material Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan

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1742-6596/502/1/012009

Abstract

We report a compact scanning transmission X-ray microscope newly designed and developed at the Photon Factory. The microscope has very compact size and is equipped with fully digitized control electronics to realize high stability, precise positioning and fast data acquisition. The hardware design of the microscope is described in detail. Results of measurement using test samples are also presented.

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10.1088/1742-6596/502/1/012009