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Developed of a Multi-Degree of Freedoms Measuring System and an Error Compensation Technique for Machine Tools

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, , Citation Wen-Yuh Jywe et al 2006 J. Phys.: Conf. Ser. 48 761 DOI 10.1088/1742-6596/48/1/144

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1 Institute of Mechanical and Electro-Mechanical Engineering, National Formosa University, Taiwan, China, 632

2 Graduate Institute of Electro-Optical and Materials Science, National Formosa University, Taiwan, China, 632

3 Department of Computer Science and Information Engineering, National Formosa University, Yunlin, Taiwan, China, 632

4 Department of Mechanical Engineering, National Chung-Cheng University, Chiayi, Taiwan, China, 621

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Abstract

In this paper, a new measuring system, Multi-Degree of Freedoms Measuring System(MDFMS), is presented. It is integrated a miniature laser interferometer with a DVD pickup and straightness measuring optical system. The five-degrees of freedoms motion errors to simultaneously measure machine tools. And, it reduces the overall time for measuring the geometric errors. The resolution and accuracy of straightness measurement are about 0.3μm and the resolution and accuracy of the angular error measurement are about 0.6arcsecs within the measuring range of 150mm. MDFMS is characteristic by simple set up, low cost, fast measuring and high accuracy for machine tools.

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10.1088/1742-6596/48/1/144