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Realization of a Cost-Effective Deformable Grating for the Extreme-Ultraviolet

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Published under licence by IOP Publishing Ltd
, , Citation F Samparisi et al 2022 J. Phys.: Conf. Ser. 2380 012058 DOI 10.1088/1742-6596/2380/1/012058

1742-6596/2380/1/012058

Abstract

The application of a deformable grating to the realization of a time delay compensated monochromator is presented. The grating is realized as a replica on a thin glass substrate and the deformation is realized with a mechanical bender. The monochromator is conceived for the spectral selection of a single harmonic in the spectral range 20-80 nm in beamlines exploiting the high harmonic generation process. A possible optical design requiring only two deformable gratings, a mirror and an intermediate slit is presented.

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10.1088/1742-6596/2380/1/012058