Paper • The following article is Open access

A universal basic for creating microsensory devices those are sensitive to changing environmental conditions

, , and

Published under licence by IOP Publishing Ltd
, , Citation N I Mukhurov et al 2019 J. Phys.: Conf. Ser. 1347 012042 DOI 10.1088/1742-6596/1347/1/012042

Download Article PDF

Article metrics

60 Total downloads

Share this article

Author affiliations

1 State Scientific and Production Association «Optics, Optoelectronics and Laser Technology», 68 Nezavisimosti av., Minsk, Belarus

2 Harbin Engineering University, Building 61, No. 145 Nantong street, Nangang District, Harbin, China

3 Harbin University of Science and Technology The new building of Harbin university of science and technology, No. 52, Xuefu Road, Nangang District, Harbin, China

Buy this article in print

Journal RSS
Sign up for new issue notifications
1742-6596/1347/1/012042

Abstract

The main advantages of alumina technology and substrates of anodic alumina with a microrelief in the bulk of the substrate as a universal basis for creating microsensor devices are presented. Microsensors of various types allow you to monitor the state of the environment. Specific examples of the development of microsensory devices for detecting humidity, gas composition in the environment, and the presence of ionizing and ultraviolet radiation are presented.

Export citation and abstract BibTeX RIS

Previous article in issue
Next article in issue

Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.

Please wait… references are loading.
10.1088/1742-6596/1347/1/012042