Abstract
We present a design of three-dimensional (3D) silica on a silicon single-mode single-polarization waveguide (SMSPW) by taking into consideration the induced birefringence effect of the silica. This can cut off the TM mode and transmit the TE mode. The characteristics of the light propagating across the polarization maintaining waveguide were simulated by 3D beam propagation methods (3D-BPM). The result showed that the SMSPW has a high extinction ratio over 50 dB for the TM mode. Without increasing the complexity of the waveguide fabricating process, this structure can be used as a polarizer directly, and can also be integrated easily into other waveguide devices.