Abstract
We have been developing new concepts of linear and circular ultrasonic actuators using traveling waves in rectangular or square structures, which are adapted to batch micro-machining of silicon. The first prototypes we built were all clamped and used a simple combination of modes allowing movement transmission through one contact point.
Yet, in order to increase the efficiency of our motors, we consider using new combinations of modes with higher ranks (and then more contact points) and also other boundary conditions.
As it is not easy to predict if an accurate quasi-traveling wave can be generated in a given structure and with a given contribution of modes, we have developed a simulation program using MAPLE software. This program uses successive criteria to select the zones where the traveling wave can be found, according to computer parameters.
In this paper, we present the different steps used to check the possibility of realizing an actuator with a given configuration in any type of structure. We illustrate this with simple theoretical examples using several structures with different boundary conditions and finally we give some experimental results obtained with a circular motor using a more complex combination of modes.
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