Study of CdTe etching process in alcoholic solutions of bromine

Changes in the structure and stoichiometry of the p-CdTe surface as a result of etching have been studied by high-resolution x-ray photoelectron spectroscopy and the Rutherford backscattering method. Etching with bromine-methanol and bromine-butanol solutions is shown to enrich the surface with elementary tellurium . The etching process is anisotropic, in particular, the extent of enrichment with is not the same for A and B surfaces. Arguments are developed in favour of the heterophase nature of the etched surface. The presence of water in the etches leads to oxidation in the course of etching. The mechanism of etching is discussed based on the data obtained.