Silicon-on-Insulator Based 2×2 MultimodeInterference Coupler with Large Tolerance

Wei Hong-Zhen; Yu Jin-Zhong; Liu Zhong-Li; Zhang Xiao-Feng; Shi Wei; Fang Chang-Shui

doi:10.1088/0256-307X/18/2/331

Chinese Physics Letters

Silicon-on-Insulator Based 2×2 Multimode Interference Coupler with Large Tolerance

Wei Hong-Zhen¹, Yu Jin-Zhong¹, Liu Zhong-Li², Zhang Xiao-Feng¹, Shi Wei³ and Fang Chang-Shui³

Published under licence by IOP Publishing Ltd
Chinese Physics Letters, Volume 18, Number 2 Citation Wei Hong-Zhen et al 2001 Chinese Phys. Lett. 18 245 DOI 10.1088/0256-307X/18/2/331

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¹ State Key Laboratory on Integrated Optoelectronics, and

² Microelectronics Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083

³ State Key Laboratory of Crystal Materials, Shandong University, Ji'nan 250100

Dates

Received 3 November 2000

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Abstract

We demonstrate a type of 2×2 multimode interference 3 dB coupler based on silicon-on-insulator. The fabrication tolerance was investigated by the effective index method and the guide mode method. The devices with different lengths were fabricated and near-field output images were obtained. Tolerances to width, length and etch depth are 2, 200 and 2 µm, respectively. The devices show a uniform power distribution.

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