X-ray diffraction from epitaxial multilayered surface gratings

X-ray diffraction from simple monocrystalline and epitaxial multilayered surface gratings will be described theoretically by use of a distorted wave Born approximation of second order. The intensity patterns of simple and multilayered gratings have been simulated by this treatment and compared with the kinematical approximation. The gratings act simultaneously as reflection and transmission gratings. This gives rise to Umweganregung also between the grating and the dynamical diffracting planar structure including the substrate.