Mass spectrometric detection of S2F and S2F2 in SF6-18O2 RF discharges

R J M M Snijkers; J F Coulon; G Turban

doi:10.1088/0022-3727/24/7/011

Journal of Physics D: Applied Physics

Mass spectrometric detection of S₂F and S₂F₂ in SF₆-¹⁸O₂ RF discharges

R J M M Snijkers¹, J F Coulon¹ and G Turban¹

Published under licence by IOP Publishing Ltd
Journal of Physics D: Applied Physics, Volume 24, Number 7 Citation R J M M Snijkers et al 1991 J. Phys. D: Appl. Phys. 24 1098 DOI 10.1088/0022-3727/24/7/011

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¹ Lab. des Plasmas et des Couches Minces, CNRS, IMN-Univ. de Nantes, France

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Abstract

In SF₆-¹⁸O₂ discharges, mass spectrometric studies have clearly shown the presence of S₂F and S₂F₂ molecules in the case of the use of fluorine consuming materials. Reaction schemes are proposed to explain the formation of S₂F and S₂F₂ molecules. These reaction paths also lead to the S₂ molecule.

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