Ejection of matrix-polymer clusters in matrix-assisted laser evaporation: Experimental observations

The morphology of polymer films deposited with the matrix-assisted pulsed laser evaporation (MAPLE) technique is explored for various target compositions and laser fluences. Composite targets of 1 to 5 wt.% poly(methyl methacrylate), PMMA, dissolved in a volatile matrix material, toluene, were ablated using an excimer laser at fluences ranging from 0.045 J/cm² to 0.75 J/cm². Films were deposited on Si substrates at room temperature in a dynamic 100 mTorr Ar atmosphere. Scanning electron microscopy (SEM) imaging revealed that the morphology of the deposited films varied significantly with both laser fluence and PMMA concentration. The morphologies of large deposited particles were similar to that of deflated ''balloons''. It is speculated that during ablation of the frozen target, clusters comprised of both polymer and solvent ranging from 100 nm to 10 μm in size are ejected and deposited onto the substrate. The solvent begins to evaporate from the clusters during flight from the target, but does not completely evaporate until deposited on the room temperature substrate. The dynamics of the toluene evaporation may lead to the formation of the deflated structures. This explanation is supported by the observation of stable polymer-matrix droplets ejected in molecular dynamics simulations of MAPLE.