Abstract
The variation of effective parameters in Micro Electro Mechanical Systems strongly affects their performance, design, and control. Hence, it is essential to understand and model the effective parameters in MEMS devices to optimize their designs. Typical MEMS (Microresonator) employ a parallel-plate capacitor, in which one plate is actuated electrically and its motion is detected by capacitive changes. In this paper we investigate nonlinear modelling of microresonators. The nonlinearities from capacitor (quadratic) and midplane stretch were considered for this purpose. The achieved microbeam's equations are nondimensionalized and by using the multiple scales method received to the equations which identified the relations between system dynamics and effective parameters of system. In other part of this paper we expand the Fuzzy Generalized Cell Mapping (FGCM) for multiparameter systems then apply FGCM to the microresonator and see how the uncertainties can affect the working domain of dynamical systems. It can be seen FGCM is so useful method for detecting the working region with variation of parameters.
Export citation and abstract BibTeX RIS