Deep p-n junction in Hg1-xCdxTe created by ion milling

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, , Citation E Belas et al 1993 Semicond. Sci. Technol. 8 1695 DOI 10.1088/0268-1242/8/9/003

0268-1242/8/9/1695

Abstract

Thick n-type layers near the surface of p-Hg1-xCdxTe produced as a result of low energy ion milling have been investigated. EBIC measurements of cleaved cross sections show the depth and shape or the p-n junction under the surface of (HgCd)Te. An analysis of the n-type layers by differential Hall effect measurements is reported. It was found that the electron concentration in the n-type layer is of the order of 1015 cm-3 and is nearly constant from the surface to the p-n junction. A diminishing density of etch pits was found on the surfaces influenced by ion milling. A model for the p-n conversion during ion milling is discussed.

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10.1088/0268-1242/8/9/003