Distributed energy analysis for an integrated radio frequency induction plasma system

Electrical and energy balance data were obtained experimentally for a 25 kW, 4-5 MHz induction plasma generation system. These are used for the validation of the predictions of an integrated mathematical model of a radio frequency power supply and induction plasma torch system. Results reported for the Tekna PL-35 torch, at different power levels, using argon as the plasma gas are in good agreement with model prediction. The integrated computer simulation model provides means for radio frequency induction plasma system optimization and scale-up.