A simple analysis of the transmission and backscattering of 10-30 keV electrons in solid layers

Published under licence by IOP Publishing Ltd
, , Citation D Liljequist 1977 J. Phys. D: Appl. Phys. 10 1363 DOI 10.1088/0022-3727/10/10/013

0022-3727/10/10/1363

Abstract

A simple analytic treatment of elastic scattering transport of particles in a plane parallel plate is combined with Monte Carlo simulations. The effect of energy loss is studied for 10-30 keV electrons. The main features of transmission and backscattering are predicted in terms of a dimensionless parameter r/ lambda tr(0) where r is the Bethe range and lambda tr(0) is the initial transport mean free path.

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10.1088/0022-3727/10/10/013