Abstract
The effect of the pump parameters on the efficiency of operation of a KrF gas-discharge excimer laser on a He—Kr—F2 mixture is studied. A theoretical model of the excitation system and the kinetic processes in the plasma of this laser is developed. A pump system based on an LC inverter with a spark gap as a high-voltage switch, automatic UV preionisation, and a low-inductance discharge circuit is created. To increase the efficiency and the output energy of the KrF laser based on a He—Kr—F2 mixture, it is proposed to enhance the pump intensity to 4 MW cm-3 by increasing the inductance between the LC inverter and the discharge circuit to 100 nH. An output energy of 1 J at an efficiency of 2% is achieved for the first time for the KrF laser operating on this mixture.