Abstract
An experimental investigation was made of the principal factors that determine the possibility to increase pulse repetition rates in high-power KrF lasers. Two prototypes of a compact industrial KrF laser were considered. The first one produces a maximum average output power of ~620 W for a pulse repetition rate of 4 kHz; the second, a more compact prototype, yields a maximum pulse repetition rate of 5 kHz for an average output of 200 W.