We have performed ion channeling characterizations on the (001) and (100) surfaces of YBa2Cu3O7−x single crystals, using 950 keV He+ ions at temperatures ranging from 20 to 780 °C. In oxygen pressures below 5×10−5Torr, we directly observed the surface changes as the sample temperature was increased, and found that the compositional and structural changes occurred from around 400 °C. At higher oxygen pressures, we heated the crystals and performed channeling analysis before and after the heating. We found that the YBa2Cu3O7−x crystal surfaces were stable at temperatures up to 780 °C in the oxygen pressure range of 1 mTorr–1 Torr. Beyond this range, the surfaces deteriorated at high temperatures.

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