High-quality (0001) and (0001̄)-GaN films were grown by plasma-assisted molecular-beam epitaxy to study the dependence of oxygen incorporation on polarity and oxygen partial pressure. Oxygen incorporates at a rate ten times faster on nitrogen-polar GaN than on the Ga polarity. Oxygen doping is controllable, reproducible, and produces low compensation material up to concentrations of at least with higher levels showing significant compensation. Layers containing oxygen at levels above exhibit severe cracking while oxygen concentrations less than do not introduce significant strain. The oxygen incorporation rate has a weak dependence on Ga overpressure during Ga-stable growth but dramatically increases for conditions approaching N-stable growth.
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22 October 2001
Research Article|
October 22 2001
Controlled oxygen doping of GaN using plasma assisted molecular-beam epitaxy
A. J. Ptak;
A. J. Ptak
Department of Physics, West Virginia University, Morgantown, West Virginia 26506
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L. J. Holbert;
L. J. Holbert
Department of Physics, West Virginia University, Morgantown, West Virginia 26506
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L. Ting;
L. Ting
Department of Physics, West Virginia University, Morgantown, West Virginia 26506
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C. H. Swartz;
C. H. Swartz
Department of Physics, West Virginia University, Morgantown, West Virginia 26506
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M. Moldovan;
M. Moldovan
Department of Physics, West Virginia University, Morgantown, West Virginia 26506
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N. C. Giles;
N. C. Giles
Department of Physics, West Virginia University, Morgantown, West Virginia 26506
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T. H. Myers;
T. H. Myers
Department of Physics, West Virginia University, Morgantown, West Virginia 26506
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P. Van Lierde;
P. Van Lierde
Evans Analytical Group, Charles Evans and Associates, Sunnyvale, California 94086
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C. Tian;
C. Tian
Evans Analytical Group, Charles Evans and Associates, Sunnyvale, California 94086
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R. A. Hockett;
R. A. Hockett
Evans Analytical Group, Charles Evans and Associates, Sunnyvale, California 94086
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S. Mitha;
S. Mitha
Evans Analytical Group, Charles Evans and Associates, Sunnyvale, California 94086
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A. E. Wickenden;
A. E. Wickenden
Laboratory for Advanced Material Synthesis, Code 6861, Electronics Science and Technology Division, Naval Research Laboratory, Washington, DC 20375
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D. D. Koleske;
D. D. Koleske
Laboratory for Advanced Material Synthesis, Code 6861, Electronics Science and Technology Division, Naval Research Laboratory, Washington, DC 20375
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R. L. Henry
R. L. Henry
Laboratory for Advanced Material Synthesis, Code 6861, Electronics Science and Technology Division, Naval Research Laboratory, Washington, DC 20375
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Appl. Phys. Lett. 79, 2740–2742 (2001)
Article history
Received:
May 07 2001
Accepted:
July 16 2001
Citation
A. J. Ptak, L. J. Holbert, L. Ting, C. H. Swartz, M. Moldovan, N. C. Giles, T. H. Myers, P. Van Lierde, C. Tian, R. A. Hockett, S. Mitha, A. E. Wickenden, D. D. Koleske, R. L. Henry; Controlled oxygen doping of GaN using plasma assisted molecular-beam epitaxy. Appl. Phys. Lett. 22 October 2001; 79 (17): 2740–2742. https://doi.org/10.1063/1.1403276
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