Your browser does not support JavaScript!
http://iet.metastore.ingenta.com
1887

Birefringence control and dispersion characteristics of silicon oxynitride optical waveguides

Birefringence control and dispersion characteristics of silicon oxynitride optical waveguides

For access to this article, please select a purchase option:

Buy article PDF
£12.50
(plus tax if applicable)
Add to cart
Buy Knowledge Pack
10 articles for £75.00
(plus taxes if applicable)
Add to cart

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Name:*
Email:*
Your details
Name:*
Email:*
Department:*
Why are you recommending this title?
Select reason:
 
 
 
 
 
Electronics Letters — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

© The Institution of Electrical Engineers
Published

The design, fabrication and characterisation of birefringent silicon oxynitride planar optical waveguides are described for applications at the wavelength of 1.54 μm. Form birefringence is attained by interposing a thin silicon nitride film in the waveguide stack, and can be controlled by adjusting the nitride layer thickness. Dispersion characteristics of the oxynitride waveguides have been measured and compared with theory.

Inspec keywords: integrated optics; optical waveguides; silicon compounds; birefringence

Other keywords: birefringent planar optical waveguides; birefringence control; form birefringence; Si3N4 layer thickness; characterisation; wavelength; SiON optical waveguides; fabrication; dispersion characteristics; design; SiON-Si3N4-SiO2; 1.54 micron

Subjects: Optical waveguides and couplers; Optical waveguides; Integrated optics; Optical propagation and transmission in homogeneous and anisotropic media; birefringence; Integrated optics

References

    1. 1)
      • Shibutani, M., Yamazaki, S., Murata, S.: `Polarization diversity coherent optical receiver with a balanced receiver configuration', Proc. ECOC 14, 1988, , p. 151–154.
    2. 2)
      • Grand, G., Valette, S., Cannell, G.J., Aarnio, J., Del Giudice, M.: `Fibre pigtailed silicon based low cost passive optical components', PROC. ECOC 16, 1990, Amsterdam, p. 525–528.
    3. 3)
      • Grant, M.F., Bellerby, R., Day, S., Cannell, G.J., Nelson, M.: `Self-aligned multiple fibre coupling for silica-on-silicon integrated optics', Proc. EFOC/LAN, 1991, p. 269–272.
    4. 4)
      • Shani, Y., Henry, C.H., Kistler, R.C., Kazarinov, R.F.: `Adiabatic polarization splitter on silicon and its application to polarization diversity detection', Proc. OFC '90, 1990, p. 35.
    5. 5)
      • Kawachi, M.: `Silica-based planar lightwave circuit technologies', Proc. ECOC 17, 1991, Paris, p. 51–58.
    6. 6)
      • H.J. Lee , C.H. Henry , K.J. Orlowsky , R.F. Kazarinov , T.Y. Kometani . Refractive index dispersion of phosphosilicate glass, thermal oxide, and silicon nitride films on silicon. Appl. Opt. , 4104 - 4109
http://iet.metastore.ingenta.com/content/journals/10.1049/el_19911435
Loading

Related content

content/journals/10.1049/el_19911435
pub_keyword,iet_inspecKeyword,pub_concept
6
6
Loading
Print this page
This is a required field
Please enter a valid email address