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High-index-contrast ridge waveguide laser with thermally oxidised etched facet and metal reflector

High-index-contrast ridge waveguide laser with thermally oxidised etched facet and metal reflector

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© The Institution of Engineering and Technology
Published

A novel GaAs-based high-index-contrast ridge waveguide quantum well heterostructure laser is demonstrated, which features an etched and wet thermally oxidised rear facet with a deposited metal mirror suitable for wafer scale integration. The self-aligned fabrication process utilises a single deep etch step and oxygen-enhanced non-selective wet oxidation of the AlGaAs heterostructure ridge sidewall and the entire exposed facet, including the waveguide core region composed of low-Al content AlGaAs material not readily oxidised by conventional techniques. Singlemode devices exhibiting thresholds as low as 20 mA at λ=808 nm are demonstrated.

Inspec keywords: aluminium compounds; quantum well lasers; III-V semiconductors; waveguide lasers; laser cavity resonators; ridge waveguides; gallium arsenide

Other keywords: quantum well heterostructure laser; metal reflector; AlGaAs; wafer scale integration; deposited metal mirror; high-index-contrast ridge waveguide laser; thermally oxidised etched facet

Subjects: Lasing action in semiconductors; Laser resonators and cavities; Semiconductor lasers; Laser resonators and cavities; Design of specific laser systems; Waveguides and microwave transmission lines

References

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      • Wang, J., Hall, D.C., Tokranov, V., Oktyabrsky, S.: `Native-oxide-confined high index contrast InAs quantum-dot laser diodes', Proc. 65th DRC Device Research Conf., 2007, South Bend, IN, USA, p. 125–126.
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      • Y. Luo , D.C. Hall . Nonselective wet oxidation of AlGaAs heterostructure waveguides through controlled addition of oxygen. IEEE J. Sel. Top. Quantum Electron. , 6 , 1284 - 1291
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      • C.S. Seibert , D.C. Hall , D. Liang , Z.A. Shellenbarger . Reduction of AlGaAs heterostructure high-index-contrast ridge waveguide scattering loss by sidewall smoothing through oxygen-enhanced wet thermal oxidation. IEEE Photonics Technol. Lett. , 18 - 20
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