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Optoelectronic VLSI switching chip with greater than 1 Tbit/s potential optical I/O bandwidth

Optoelectronic VLSI switching chip with greater than 1 Tbit/s potential optical I/O bandwidth

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The authors describe an optoelectronic switching chip with 1024 differential optical inputs and 1024 differential optical outputs with individual channels tested above 600 Mbit/s. The technology for the chip consists of 850 nm GaAs/AlGaAs multiquantum well (MQW) detectors and modulators, flip-chip bonded onto silicon CMOS with substrate removal to allow access to the optical devices.

References

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      • A.L. Lentine , D.J. Reiley , R.A. Novotny , R.L. Morrison , J.M. Sasian , M.G. Beckman , D.B. Buchholz , S.J. Hinterlong , T.J. Cloonan , G.W. Richards , F.B. McCormick . ATM distribution network using an optoelectronic VLSI switching chip. Appl. Opt.
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      • Cloonan, T.J., Richards, G.W.: USA, 5,537,403, .
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      • A.V. Krishnamoorthy , A.L. Lentine , K.W. Goossen , J.A. Walker , T.K. Woodward , J.E. Ford , G.F. Aplin , L.A. D'Asaro , S.P. Hui , B. Tseng , R.E. Leibenguth , D. Kossives , D. Dahringer , L.M.F. Chirovsky , D.A.B. Miller . 3-D integration of MQW SEED modulators over active sub-micron CMOS circuits:375 Mbit/s transimpedence receiver-transmitter circuit. IEEE Photonics Technol. Lett. , 1288 - 1290
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      • Buchholz, D.B., Lentine, A.L., Novotny, R.A.: `Thermal considerations in the design of optoelectronic device mounts', Topical Meeting on Photonics in Switching, 1995, p. 118–120.
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      • A.L. Lentine , K.W. Goossen , J.A. Walker , L.M.F. Chirovsky , L.A. D'Asaro , S.P. Hui , B.J. Tseng , R.E. Leibenguth , J.E. Cunningham , W.Y. Jan , J.M. Kuo , D. Dahringer , D. Kossives , D.D. Bacon , G. Livescu , R.L. Morrison , R.A. Novotny , D.B. Buchholz . Optoelectronic VLSI switching chip with greater than 4000 optical I/Obased on flip chip bonding of GaAs/AlGaAs MQW modulators and detectors to siliconCMOS. J. Sel. Top. Quantum Electron. , 77 - 84
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      • T.K. Woodward , A.V. Krishnamoorthy , A.L. Lentine , K.W. Goossen , J.A. Walker , J.E. Cunningham , W. Jan , L.A. D'Asaro , L.M.F. Chirovsky , S.P. Hui , B. Tseng , D. Kossives , D. Dahringer , R.E. Leibenguth . 1 Gbit/s two-beam transimpedence smart pixels optical receivers madefrom hybrid GaAs MQW modulators bonded to 0.8 µm silicon CMOS. IEEE Photonics Technol. Lett. , 422 - 424
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