Issue 12, 2007

Calibration of nitrogen content for GDOES depth profiling of complex nitride coatings

Abstract

Quantitative GDOES studies in protective coating materials (oxides, nitrides, oxynitrides, etc.) are severely limited by the lack of certified standards containing known amounts of oxygen and/or nitrogen. In this work, we propose an alternative method for nitrogen quantification using as calibration samples, a series of deposited nitride coatings whose composition is pre-established by absolute quantitative measurements with Rutherford backscattering spectrometry. This calibration approach was successfully applied to the study of different complex nitride systems as nanometric multilayers or nanocomposite, and to enlarge the application of GDOES to a wider range of practical applications.

Graphical abstract: Calibration of nitrogen content for GDOES depth profiling of complex nitride coatings

Article information

Article type
Technical Note
Submitted
09 Mar 2007
Accepted
30 Jul 2007
First published
20 Aug 2007

J. Anal. At. Spectrom., 2007,22, 1512-1516

Calibration of nitrogen content for GDOES depth profiling of complex nitride coatings

R. Escobar Galindo, E. Forniés, R. Gago and J. M. Albella, J. Anal. At. Spectrom., 2007, 22, 1512 DOI: 10.1039/B711657H

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