Issue 4, 2003
From the journal:

Lab on a Chip

Microstructure fabrication with a CO2 laser system: characterization and fabrication of cavities produced by raster scanning of the laser beam

Martin F. Jensen,ab   Mikkel Noerholm,bc   Leif Højslet Christensena  and  Oliver Geschkeb  

a Center for Microtechnology and Surface Analysis, Danish Technological Institute, Gregersensvej 1, DK-2630 Taastrup, Denmark
E-mail: Martin.Jensen@teknologisk.dk
Fax: +45 7220 3307
Tel: +45 7220 3311

b Mikroelektronik Centret (MIC), Technical University of Denmark, DK-2800 Kongens Lyngby, Denmark
E-mail: og@mic.dtu.dk

c Exiqon A/S, Bystubben 9, DK-2950 Vedbæk, Denmark
E-mail: noerholm@exiqon.com

Abstract

In this paper we describe the use of a CO2 laser for production of cavities and microstructures in poly(methyl methacrylate) (PMMA) by moving the laser beam over the PMMA surface in a raster pattern. The topography of the cavities thus produced is studied using stylus and optical profilometry and scanning electron microscopy (SEM). The microstructures display artifacts from the laser ablation process and we describe how the laser ablation parameters can be optimized in order to minimize these artifacts. Using this technique it is possible to generate structures with a depth from 50 µm and a minimum width of approximately 200 µm up to depth and widths of several mm, governed by the beam size and the laser settings.

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Article information

DOI
https://doi.org/10.1039/B308153B
Article type
Paper
Submitted
16 Jul 2003
Accepted
17 Sep 2003
First published
07 Oct 2003

Lab Chip, 2003,3, 302-307

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Microstructure fabrication with a CO2 laser system: characterization and fabrication of cavities produced by raster scanning of the laser beam

M. F. Jensen, M. Noerholm, L. H. Christensen and O. Geschke, Lab Chip, 2003, 3, 302 DOI: 10.1039/B308153B

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